Understand modern lithography technology driving sub-7nm patterning. Covers optical lithography fundamentals, DUV immersion lithography, EUV technology, OPC and mask data preparation, multiple patterning (SADP/SAQP), and stochastic effects at advanced nodes.
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| Expiry period | Lifetime | ||
| Made in | English | ||
| Last updated at | Sun Apr 2026 | ||
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| Total lectures | 0 | ||
| Total quizzes | 0 | ||
| Total duration | Hours | ||
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| Number of reviews | 605 | ||
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| Short description | Understand modern lithography technology driving sub-7nm patterning. Covers optical lithography fundamentals, DUV immersion lithography, EUV technology, OPC and mask data preparation, multiple patterning (SADP/SAQP), and stochastic effects at advanced nodes. | ||
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